The centrifugal dual medium gas combination compressor independently developed by Kaishan Shanghai General Machinery Research Institute has been successfully debugged and put into use by a globally leading integrated circuit manufacturing enterprise in Jiangsu. All parameters meet the design requirements and have received praise from users.
As is well known, among the eight core materials in the semiconductor industry, electronic gas is the main raw material second only to silicon, accounting for 13.5% of the value of semiconductor wafer manufacturing materials. Electronic gases are widely used in the manufacturing process of electronic products, including ion implantation, etching, gas phase, deposition, doping, etc. They are known as the “food” and “source” of materials such as integrated circuits, LCD panels, LEDs, and photovoltaics. The performance of electronic semiconductor devices is closely related to the quality of electronic gases, and high-purity/ultra-high purity nitrogen is an extremely important member of electronic gases. It is an indispensable raw gas and process gas in semiconductor production processes such as inert protection, carrier gas, special gas, pipeline blowing exhaust, dilution, and plasma injection. The centrifugal dual medium gas combination compressor unit is the core equipment in the production process of high-purity nitrogen. For a long time, the market for this type of compressor has been monopolized by American companies.
The unit that was successfully put into operation this time is the first domestically produced compressor of this type manufactured by Kaishan with completely independent intellectual property rights. It is used in the nitrogen production system of a Fortune 500 internationally renowned gas company, and this is also the first cooperation between this enterprise and a Chinese compressor manufacturer. The successful operation has greatly enhanced the market competitiveness of the company’s high-purity nitrogen preparation system. This is the result of four years of joint efforts by both sides.
At the same time, the debugging work of two sets of this type of compressor used in domestic high-purity nitrogen preparation systems has also been completed, and all parameters meet the design requirements, and some parameters even exceed the design requirements
Over the past two decades, Kaishan has continuously invested heavily in core technologies, gradually building certain technological advantages in various types of compressors such as screws, turbines, reciprocating compressors, expanders, vacuum pumps, and many other fields. Against the backdrop of the increasing demand for localization, this technological advantage not only prevents our Chinese users from sacrificing the quality of the required equipment for localization, but also enables them to obtain more reliable product quality and lower energy consumption after localization. For our international users, we have found that Chinese equipment represented by Kaishan has brought them greater benefits. The successful operation of this centrifugal dual medium gas combination compressor is just a small example of the aforementioned text.
